
Fa'amatalaga
Silicon Carbide Wafer SiC, e matua'i faigata, fa'apipi'i fa'apipi'i tioata o le silicon ma carbon e ala ile MOCVD, ma fa'aalia.o lona vaeluaga lautele lautele ma isi uiga lelei o le maualalo o le faʻalauteleina o le vevela, maualuga le vevela o le faʻaogaina, faʻafefe lelei o le vevela, faʻaitiitia le suiga ma le faʻaogaina o le gau, sili atu le malosi o le malosi, maualuga le vevela ma le malosi o le eletise eletise malosi, faʻapea foʻi ma le tele o galu. tulaga.Silicon Carbide SiC i Western Minmetals (SC) Corporation e mafai ona tuʻuina atu i le tele o le 2″ 3'4″ ma le 6″ (50mm, 75mm, 100mm, 150mm) le lautele, faʻatasi ai ma le ituaiga n, semi-insulating poʻo le dummy wafer mo pisinisi. ma le falesuesue talosaga.Soʻo se faʻasalalauga faʻapitoa e mo le fofo atoatoa i tatou tagata faʻatau i le lalolagi atoa.
Talosaga
O le 4H/6H Silicon Carbide SiC wafer e lelei atoatoa mo le gaosiga o le tele o mea e sili atu le vave, maualuga-vevela & eletise eletise eletise e pei o Schottky diodes & SBD, maualuga-mana sui MOSFETs & JFETs, ma isi. ose mea e mana'omia i le su'esu'ega ma le atina'eina o transistors bipolar ma thyristors.I le avea ai o se mea fou fa'atupu semiconducting, o le Silicon Carbide SiC wafer o lo'o galue foi e avea o se fa'asalalauina lelei o le vevela i vaega o le eletise maualuga, po'o se mea mautu ma ta'uta'ua mo le fa'atupuina o le GaN layer e fa'atatau i su'esu'ega fa'asaienisi i le lumana'i.
Fa'amatalaga Fa'apitoa
Silicon Carbide SiCi Western Minmetals (SC) Faalapotopotoga e mafai ona tuʻuina atu i le tele o le 2″ 3'4″ ma le 6″ (50mm, 75mm, 100mm, 150mm) le lautele, faʻatasi ai ma le ituaiga n, semi-insulating poʻo le dummy wafer mo fale gaosi oloa ma falesuesue. .Soʻo se faʻasalalauga faʻapitoa e mo le tali sili ona lelei i a tatou tagata faʻatau i le lalolagi atoa.
| Fua Faatatau Linear | SiC |
| Molecular Weight | 40.1 |
| Fauga tioata | Wurtzite |
| Fa'aaliga | Malosi |
| Lisi Lisi | 3103±40K |
| Fa'apuna | N/A |
| Malosi ile 300K | 3.21 g/cm3 |
| Gap Malosiaga | (3.00-3.23) eV |
| Tete'e i totonu | >1E5 Ω-cm |
| Numera CAS | 409-21-2 |
| Numera EC | 206-991-8 |
| Leai. | Aitema | Fa'amatalaga Tulaga | |||
| 1 | SiC Tele | 2" | 3" | 4" | 6" |
| 2 | Ole mita mm | 50.8 0.38 | 76.2 0.38 | 100 0.5 | 150 0.5 |
| 3 | Metotia Tuputupu | MOCVD | MOCVD | MOCVD | MOCVD |
| 4 | Ituaiga Conductivity | 4H-N, 6H-N, 4H-SI, 6H-SI | |||
| 5 | Resistivity Ω-cm | 0.015-0.028;0.02-0.1;>1E5 | |||
| 6 | Fa'atonuga | 0°±0.5°;4.0° agai i le <1120> | |||
| 7 | Mafiafia μm | 330±25 | 330±25 | (350-500)±25 | (350-500)±25 |
| 8 | Nofoaga mafolafola Primary | <1-100>±5° | <1-100>±5° | <1-100>±5° | <1-100>±5° |
| 9 | Primary Flat Umi mm | 16±1.7 | 22.2±3.2 | 32.5±2 | 47.5±2.5 |
| 10 | Nofoaga Lua mafolafola | Silisi fa'asaga i luga: 90°, fa'asaga i le uati mai le matua laugatasi ±5.0° | |||
| 11 | Lua mafolafola Umi mm | 8±1.7 | 11.2±1.5 | 18±2 | 22±2.5 |
| 12 | TTV μm maualuga | 15 | 15 | 15 | 15 |
| 13 | punou μm maualuga | 40 | 40 | 40 | 40 |
| 14 | Mata'utia μm | 60 | 60 | 60 | 60 |
| 15 | Tu'u ese mm le maualuga | 1 | 2 | 3 | 3 |
| 16 | Micropipe Density cm-2 | <5, alamanuia;<15, fale suesue;<50, valea | |||
| 17 | Fa'asalaina cm-2 | <3000, alamanuia;<20000, fale suesue;<500000, fa'afoliga | |||
| 18 | Lau'ele'ele Nm max | 1(Polisi), 0.5 (CMP) | |||
| 19 | Ta'eta'ei | Leai, mo tulaga tau alamanuia | |||
| 20 | Papatusi Hexagonal | Leai, mo tulaga tau alamanuia | |||
| 21 | Masisi | ≤3mm, umi atoa itiiti ifo nai lo substrate diameter | |||
| 22 | Tipi Chips | Leai, mo tulaga tau alamanuia | |||
| 23 | afifiina | Koneteina wafer ta'itasi ua fa'amaufa'ailogaina ile taga alumini fa'afefiloi. | |||
Silicon Carbide SiC 4H/6He lelei atoatoa wafer mo le gaosiga o le tele o mea aupito sili ona vave, maualuga-vevela & maualuga-voltage masini faaeletonika e pei o Schottky diodes & SBD, maualuga-mana sui MOSFETs & JFETs, ma isi O se mea manaomia foi i le su'esu'ega & atina'e o transistors bipolar ma thyristors fa'amama.I le avea ai o se mea fou fa'atupu semiconducting, o le Silicon Carbide SiC wafer o lo'o galue foi e avea o se fa'asalalauina lelei o le vevela i vaega o le eletise maualuga, po'o se mea mautu ma ta'uta'ua mo le fa'atupuina o le GaN layer e fa'atatau i su'esu'ega fa'asaienisi i le lumana'i.
Fa'atauga Fautuaga
Silicon Carbide SiC